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Preparation of carbon nanoparticles by plasma-assisted pulsed laser deposition method : size and binding energy dependence on ambient gas pressure and plasma condition
| Title: | Preparation of carbon nanoparticles by plasma-assisted pulsed laser deposition method : size and binding energy dependence on ambient gas pressure and plasma condition |
| Authors: | Suda, Yoshiyuki1 Browse this author →KAKEN DB | | Ono, T. Browse this author | | Akazawa, M. Browse this author →KAKEN DB | | Sakai, Y. Browse this author | | Tsujino, J. Browse this author | | Homma, N. Browse this author |
| Authors(alt): | 須田, 善行1 |
| Keywords: | Nanoparticle | | Laser ablation | | Carbon | | RF plasma | | Amorphous materials |
| Issue Date: | 1-Aug-2002 |
| Publisher: | Elsevier |
| Journal Title: | Thin Solid Films |
| Volume: | 415 |
| Issue: | 1-2 |
| Start Page: | 15 |
| End Page: | 20 |
| Publisher DOI: | 10.1016/S0040-6090(02)00532-1 |
| Abstract: | Nanometer-size carbon particles were prepared on a Si substrate using pulsed laser deposition (PLD) assisted by radio frequency (RF) Ar plasma and were compared with ones prepared by PLD in vacuum and Ar gas. In both the plasma and gas ambiences, experiments were carried out in Ar pressure pAr ranging from 0.13 to 13 Pa. The particle size increased as pAr increased. However, the size obtained in the RF Ar plasma was approximately 1.5 times larger than that prepared in the Ar gas. An X-ray photoelectron spectroscopy (XPS) analysis revealed that the carbon film covered by the particles was in an amorphous state. The sp3/sp2 carbon ratio of the film was evaluated by deconvolution of XPS carbon (1s) spectra into three components, which are attributed to diamond (sp3), graphite (sp2) and carbon oxide components. The highest sp3/sp2 ratio was 0.4 in the Ar gas and Ar plasma at pAr = 0.13 Pa. The sp3/sp2 ratio decreases monotonously, as the particle size increases. The ratio obtained in the Ar plasma is larger than that in the Ar gas. The effects of pAr and plasma for nanoparticle characteristic are discussed. |
| Relation: | http://www.sciencedirect.com/science/journal/00406090 |
| Type: | article (author version) |
| URI: | http://hdl.handle.net/2115/8945 |
| Appears in Collections: | 情報科学院・情報科学研究院 (Graduate School of Information Science and Technology / Faculty of Information Science and Technology) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 須田 善行
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