Deposition of fine carbon particles using pulsed ArF laser ablation assisted by inductively coupled plasma

Suda, Yoshiyuki; Nishimura, T.; Ono, T.; Akazawa, M.; Sakai, Y.; Homma, N.

doi:10.1016/S0040-6090(00)01167-6


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Deposition of fine carbon particles using pulsed ArF laser ablation assisted by inductively coupled plasma

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/8946

Title:	Deposition of fine carbon particles using pulsed ArF laser ablation assisted by inductively coupled plasma
Authors:	Suda, Yoshiyuki¹ Browse this author →KAKEN DB
	Nishimura, T. Browse this author
	Ono, T. Browse this author
	Akazawa, M. Browse this author →KAKEN DB
	Sakai, Y. Browse this author
	Homma, N. Browse this author
Authors(alt):	須田, 善行¹
Keywords:	Laser ablation
	Inductively coupled plasma (ICP)
	Particle growth
	Ambient gas
	Diamond like carbon (DLC)
Issue Date:	17-Oct-2000
Publisher:	Elsevier
Journal Title:	Thin Solid Films
Volume:	374
Issue:	2
Start Page:	287
End Page:	290
Publisher DOI:	10.1016/S0040-6090(00)01167-6
Abstract:	Carbon thin films containing many fine carbon particles were deposited by a pulsed ArF laser ablation technique assisted by inductively coupled plasma (ICP). The sizes of the particles were found to be - 100 nm. The particles seemed to be coagulated from several finer particles of size - 10 nm. When ICP was applied to a plume, the shape of the coagulated particles became spherical. The deposited surface was assumed to be diamond-like carbon based on the binding energy of carbon (1s) in the particle obtained by XPS spectra.
Relation:	http://www.sciencedirect.com/science/journal/00406090
Type:	article (author version)
URI:	http://hdl.handle.net/2115/8946
Appears in Collections:	情報科学院・情報科学研究院 (Graduate School of Information Science and Technology / Faculty of Information Science and Technology) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 須田善行

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