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Deposition of fine carbon particles using pulsed ArF laser ablation assisted by inductively coupled plasma

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Title: Deposition of fine carbon particles using pulsed ArF laser ablation assisted by inductively coupled plasma
Authors: Suda, Yoshiyuki1 Browse this author →KAKEN DB
Nishimura, T. Browse this author
Ono, T. Browse this author
Akazawa, M. Browse this author →KAKEN DB
Sakai, Y. Browse this author
Homma, N. Browse this author
Authors(alt): 須田, 善行1
Keywords: Laser ablation
Inductively coupled plasma (ICP)
Particle growth
Ambient gas
Diamond like carbon (DLC)
Issue Date: 17-Oct-2000
Publisher: Elsevier
Journal Title: Thin Solid Films
Volume: 374
Issue: 2
Start Page: 287
End Page: 290
Publisher DOI: 10.1016/S0040-6090(00)01167-6
Abstract: Carbon thin films containing many fine carbon particles were deposited by a pulsed ArF laser ablation technique assisted by inductively coupled plasma (ICP). The sizes of the particles were found to be - 100 nm. The particles seemed to be coagulated from several finer particles of size - 10 nm. When ICP was applied to a plume, the shape of the coagulated particles became spherical. The deposited surface was assumed to be diamond-like carbon based on the binding energy of carbon (1s) in the particle obtained by XPS spectra.
Relation: http://www.sciencedirect.com/science/journal/00406090
Type: article (author version)
URI: http://hdl.handle.net/2115/8946
Appears in Collections:情報科学院・情報科学研究院 (Graduate School of Information Science and Technology / Faculty of Information Science and Technology) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 須田 善行

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