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Hokkaido University Collection of Scholarly and Academic Papers
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article (author version)
Shimabayashi, Masaharu
;
Kurihara, Kazuaki
;
Horikawa, Yoshimine
;
Sasaki, Koichi
Nitriding characteristics of 4H-SiC irradiated with remote nitrogen plasmas
-
Japanese Journal of Applied Physics (JJAP)
-
Mar-2016
article (author version)
Shimabayashi, Masaharu
;
Kurihara, Kazuaki
;
Sasaki, Koichi
Suppression of carbon desorption from 4H-SiC by irradiating a remote nitrogen plasma at a low temperature
-
Japanese Journal of Applied Physics (JJAP)
-
May-2018
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