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Self-assembled formation of uniform InP nanopore arrays by electrochemical anodization in HCl based electrolyte

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タイトル: Self-assembled formation of uniform InP nanopore arrays by electrochemical anodization in HCl based electrolyte
著者: Sato, Taketomo 著作を一覧する
Fujino, Toshiyuki 著作を一覧する
Hasegawa, Hideki 著作を一覧する
キーワード: Electrochemical anodization
Porous structure
InP
(0 0 1)
(1 1 1)A
(1 1 1)B
発行日: 2006年 5月30日
出版者: Elsevier B.V.
誌名: Applied Surface Science
巻: 252
号: 15
開始ページ: 5457
終了ページ: 5461
出版社 DOI: 10.1016/j.apsusc.2005.12.085
抄録: Attempts were made to optimize the electrochemical anodization process for the formation of high-density, regular and straight nanopore arrays on InP. The structure, shape and size of the pores were very sensitive to substrate orientations, electrolyte concentrations and anodization voltages. Among (1 1 1)A, (1 1 1)B and (0 0 1) substrate orientations, the most uniform and most straight nanopore arrays were obtained on (0 0 1) substrates at anodization voltages of 5–7 V by using 1.0–1.5 M HCl electrolyte containing HNO3. The pore depth could be controlled up to 80 μm by the anodization time.
関連URI: http://www.sciencedirect.com/science/journal/01694332
資料タイプ: article (author version)
URI: http://hdl.handle.net/2115/14591
出現コレクション:雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

提供者: 佐藤 威友

 

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