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Self-assembled formation of uniform InP nanopore arrays by electrochemical anodization in HCl based electrolyte

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Title: Self-assembled formation of uniform InP nanopore arrays by electrochemical anodization in HCl based electrolyte
Authors: Sato, Taketomo Browse this author →KAKEN DB
Fujino, Toshiyuki Browse this author
Hasegawa, Hideki Browse this author
Keywords: Electrochemical anodization
Porous structure
InP
(0 0 1)
(1 1 1)A
(1 1 1)B
Issue Date: 30-May-2006
Publisher: Elsevier B.V.
Journal Title: Applied Surface Science
Volume: 252
Issue: 15
Start Page: 5457
End Page: 5461
Publisher DOI: 10.1016/j.apsusc.2005.12.085
Abstract: Attempts were made to optimize the electrochemical anodization process for the formation of high-density, regular and straight nanopore arrays on InP. The structure, shape and size of the pores were very sensitive to substrate orientations, electrolyte concentrations and anodization voltages. Among (1 1 1)A, (1 1 1)B and (0 0 1) substrate orientations, the most uniform and most straight nanopore arrays were obtained on (0 0 1) substrates at anodization voltages of 5–7 V by using 1.0–1.5 M HCl electrolyte containing HNO3. The pore depth could be controlled up to 80 μm by the anodization time.
Relation: http://www.sciencedirect.com/science/journal/01694332
Type: article (author version)
URI: http://hdl.handle.net/2115/14591
Appears in Collections:量子集積エレクトロニクス研究センター (Research Center for Integrated Quantum Electronics) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 佐藤 威友

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