Self-assembled formation of uniform InP nanopore arrays by electrochemical anodization in HCl based electrolyte


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Title:	Self-assembled formation of uniform InP nanopore arrays by electrochemical anodization in HCl based electrolyte
Authors:	Sato, Taketomo Browse this author →KAKEN DB
	Fujino, Toshiyuki Browse this author
	Hasegawa, Hideki Browse this author
Keywords:	Electrochemical anodization
	Porous structure
	InP
	(0 0 1)
	(1 1 1)A
	(1 1 1)B
Issue Date:	30-May-2006
Publisher:	Elsevier B.V.
Journal Title:	Applied Surface Science
Volume:	252
Issue:	15
Start Page:	5457
End Page:	5461
Publisher DOI:	10.1016/j.apsusc.2005.12.085
Abstract:	Attempts were made to optimize the electrochemical anodization process for the formation of high-density, regular and straight nanopore arrays on InP. The structure, shape and size of the pores were very sensitive to substrate orientations, electrolyte concentrations and anodization voltages. Among (1 1 1)A, (1 1 1)B and (0 0 1) substrate orientations, the most uniform and most straight nanopore arrays were obtained on (0 0 1) substrates at anodization voltages of 5–7 V by using 1.0–1.5 M HCl electrolyte containing HNO3. The pore depth could be controlled up to 80 μm by the anodization time.
Relation:	http://www.sciencedirect.com/science/journal/01694332
Type:	article (author version)
URI:	http://hdl.handle.net/2115/14591
Appears in Collections:	量子集積エレクトロニクス研究センター (Research Center for Integrated Quantum Electronics) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 佐藤威友

OAI-PMH ( junii2 , jpcoar_1.0 )

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