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Liquid-phase sensors using open-gate AlGaN/GaN high electron mobility transistor structure

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タイトル: Liquid-phase sensors using open-gate AlGaN/GaN high electron mobility transistor structure
著者: Kokawa, Takuya 著作を一覧する
Sato, Taketomo 著作を一覧する
Hasegawa, Hideki 著作を一覧する
Hashizume, Tamotsu 著作を一覧する
発行日: 2006年 7月25日
出版者: AVS Science & Technology of Materials, Interfaces, and Processing
誌名: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
巻: 24
号: 4
開始ページ: 1972
終了ページ: 1976
出版社 DOI: 10.1116/1.2214701
抄録: Liquid-phase sensing characteristics of open-gate AlGaN/GaN high electron mobility transistor (HEMT) structures were investigated in aqueous solutions and polar liquids. In de-ionized water, the open-gate HEMT clearly showed good drain I-V characteristics with current saturation and pinch-off behavior, very similar to I-V characteristics of typical Schottky-gate HEMTs. We observed a fine parallel shift in the transfer curves according to change in the pH value in a solution, indicating the corresponding potential change at the AlGaN surface. The sensitivity for the potential change was 57.5 mV/pH, very close to the theoretical value of 58.9 mV/pH at 24 °C for the Nernstian response to H+ ions. In the low drain bias region, the drain current linearly decreased with the pH value. This also indicated a systematic potential change at the AlGaN surface due to pH change. The present open-gate device showed a fast response to the pH change and a stable operation at fixed pH values. A possible mechanism for the pH response of the AlGaN surface is discussed in terms of equilibrium reactions of hydroxyls at the AlGaN surface with H+ in a solution. It was also found that the device was quite sensitive to changes in the electrostatic boundary conditions of the open-gate area by exposure to polar liquids. The drain current linearly decreased with increasing normalized liquid dipole moment.
資料タイプ: article
URI: http://hdl.handle.net/2115/14592
出現コレクション:雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

提供者: 佐藤 威友

 

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