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Laser micromachining of porous anodic alumina film

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Title: Laser micromachining of porous anodic alumina film
Authors: Jha, Himendra Browse this author
Kikuchi, Tatsuya Browse this author →KAKEN DB
Sakairi, Masatoshi Browse this author →KAKEN DB
Takahashi, Hideaki Browse this author
Issue Date: Sep-2007
Publisher: Springer Berlin / Heidelberg
Journal Title: Applied Physics A: Materials Science & Processing
Volume: 88
Issue: 4
Start Page: 617
End Page: 622
Publisher DOI: 10.1007/s00339-007-4140-4
Abstract: A laser direct-write process on porous anodic alumina film is carried out for the fabrication of microstructure on the film, using nanosecond, second harmonic Nd:YAG laser. Laser micromachining can be preformed in two different ways on colored and pore-sealed anodic alumina film, to generate microstructures on the film. Removal of the aluminum substrate before laser irradiation greatly improves the shape characteristics of the microstructure. The depth of microstructures can be controlled by the power and the scanning speed of the laser beam. Several structures with depths from 1 to 35 μm were fabricated on anodic alumina film with good precision and reproducibility.
Rights: The original publication is available at
Type: article (author version)
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 高橋 英明

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