Chemical and Potential Bending Characteristics of SiNx/AlGaN Interfaces Prepared by In Situ Metal-Organic Chemical Vapor Deposition

Ogawa, Eri; Hashizume, Tamotsu; Nakazawa, Satoshi; Ueda, Tetsuzo; Tanaka, Tsuyoshi

doi:10.1143/JJAP.46.L590


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Chemical and Potential Bending Characteristics of SiNx/AlGaN Interfaces Prepared by In Situ Metal-Organic Chemical Vapor Deposition

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Title:	Chemical and Potential Bending Characteristics of SiNx/AlGaN Interfaces Prepared by In Situ Metal-Organic Chemical Vapor Deposition
Authors:	Ogawa, Eri Browse this author
	Hashizume, Tamotsu Browse this author →KAKEN DB
	Nakazawa, Satoshi Browse this author
	Ueda, Tetsuzo Browse this author
	Tanaka, Tsuyoshi Browse this author
Keywords:	SiN
	in situ
	MOCVD
	AlGaN
	XPS
	surface
	potential
Issue Date:	25-Jun-2007
Publisher:	Japan Society of Applied Physics
Journal Title:	Japanese Journal of Applied Physics. Pt. 2, Letters & express letters
Volume:	46
Issue:	24
Start Page:	L590
End Page:	L592
Publisher DOI:	10.1143/JJAP.46.L590
Abstract:	We investigate the chemical and potential-bending characteristics of in situ SiNx/AlGaN interfaces prepared by metal-organic chemical vapor deposition. X-ray photoelectron spectroscopy showed that the in situ SiNx layer had typical chemical binding energies corresponding to the Si-N bonds. The in situ SiNx deposition brought no chemical degradation on the AlGaN surface at the SiNx/AlGaN interface, whereas the ex situ deposition of SiNx by a plasma process induced chemical disorder on the AlGaN surface including a composition change and the formation of interfacial oxides. A significant reduction in the surface band bending was observed on the AlGaN surface after the in situ SiNx passivation, probably due to a decrease in the surface state density.
Rights:	Copyright © 2007 The Japan Society of Applied Physics
Type:	article (author version)
URI:	http://hdl.handle.net/2115/33899
Appears in Collections:	量子集積エレクトロニクス研究センター (Research Center for Integrated Quantum Electronics) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 橋詰保

OAI-PMH ( junii2 , jpcoar_1.0 )

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