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Carbon-Nanotube Growth in Alcohol-Vapor Plasma

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Title: Carbon-Nanotube Growth in Alcohol-Vapor Plasma
Authors: Suda, Yoshiyuki Browse this author
Okita, Atsushi Browse this author
Takayama, Junichi Browse this author
Oda, Akinori Browse this author
Sugawara, Hirotake Browse this author →KAKEN DB
Sakai, Yosuke Browse this author
Oke, Shinichiro Browse this author
Takikawa, Hirofumi Browse this author
Keywords: carbon nanotube (CNT)
mass spectrometry
optical-emission spectroscopy (OES)
plasma-enhanced chemical vapor deposition (PECVD)
Issue Date: Jul-2009
Publisher: IEEE
Journal Title: IEEE Transactions on Plasma Science
Volume: 37
Issue: 7
Start Page: 1150
End Page: 1155
Publisher DOI: 10.1109/TPS.2009.2015451
Abstract: We have successfully grown carbon nanotubes (CNTs) by plasma-enhanced chemical vapor deposition (PECVD) using alcohol. When 0.01-wt% ferrocene was added to the alcohol, vertically aligned CNTs grew at 650℃. By contrast, a few CNTs and mostly carbon nanoparticles were obtained by pure alcohol PECVD even though the Fe catalyst was coated on Si substrates. Comparing this PECVD experiment with thermal alcohol CVD showed that only the PECVD method can be used to grow CNTs under the reported experimental conditions. To understand the plasma properties for CNT growth, particularly plasma species contained in a gas phase of alcohol plasma, the plasma was analyzed using optical-emission spectroscopy (OES) and quadrupole mass spectrometry (QMS). From the OES measurement, emission peaks from the excitation states of C2, CH, CHO, CH2O, CO, H, O2, C+, and CO+ were identified, while the QMS measurement also showed the existence of H2, O, and CO. These results indicate that, in alcohol plasma, oxidants and reductants exist together and potentially promote/suppress CNT growth depending on the process conditions. The contribution of CxHy (x≥1, y≥3) radicals, which were produced by decomposition reactions in alcohol plasma as a CNT precursor, is discussed.
Rights: © 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Type: article
Appears in Collections:情報科学院・情報科学研究院 (Graduate School of Information Science and Technology / Faculty of Information Science and Technology) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 須田 善行

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