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Carbon-Nanotube Growth in Alcohol-Vapor Plasma

Y_Suda-IEEE-TPS-37-2009-1150.pdf586.65 kBPDF見る/開く

タイトル: Carbon-Nanotube Growth in Alcohol-Vapor Plasma
著者: Suda, Yoshiyuki 著作を一覧する
Okita, Atsushi 著作を一覧する
Takayama, Junichi 著作を一覧する
Oda, Akinori 著作を一覧する
Sugawara, Hirotake 著作を一覧する
Sakai, Yosuke 著作を一覧する
Oke, Shinichiro 著作を一覧する
Takikawa, Hirofumi 著作を一覧する
キーワード: carbon nanotube (CNT)
mass spectrometry
optical-emission spectroscopy (OES)
plasma-enhanced chemical vapor deposition (PECVD)
発行日: 2009年 7月
出版者: IEEE
誌名: IEEE Transactions on Plasma Science
巻: 37
号: 7
開始ページ: 1150
終了ページ: 1155
出版社 DOI: 10.1109/TPS.2009.2015451
抄録: We have successfully grown carbon nanotubes (CNTs) by plasma-enhanced chemical vapor deposition (PECVD) using alcohol. When 0.01-wt% ferrocene was added to the alcohol, vertically aligned CNTs grew at 650℃. By contrast, a few CNTs and mostly carbon nanoparticles were obtained by pure alcohol PECVD even though the Fe catalyst was coated on Si substrates. Comparing this PECVD experiment with thermal alcohol CVD showed that only the PECVD method can be used to grow CNTs under the reported experimental conditions. To understand the plasma properties for CNT growth, particularly plasma species contained in a gas phase of alcohol plasma, the plasma was analyzed using optical-emission spectroscopy (OES) and quadrupole mass spectrometry (QMS). From the OES measurement, emission peaks from the excitation states of C2, CH, CHO, CH2O, CO, H, O2, C+, and CO+ were identified, while the QMS measurement also showed the existence of H2, O, and CO. These results indicate that, in alcohol plasma, oxidants and reductants exist together and potentially promote/suppress CNT growth depending on the process conditions. The contribution of CxHy (x≥1, y≥3) radicals, which were produced by decomposition reactions in alcohol plasma as a CNT precursor, is discussed.
Rights: © 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
資料タイプ: article
出現コレクション:雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

提供者: 須田 善行


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