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北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.127 >
等温過渡容量法 (ICTS) によるアモルファスSi MIS構造の評価
Title: | 等温過渡容量法 (ICTS) によるアモルファスSi MIS構造の評価 |
Other Titles: | Characterization of Interface Properties in an Amorphous Silicon Metal Insulator Semiconductor Structure by Isothermal Capacitance Transient Spectroscopy |
Authors: | 有本, 智1 Browse this author | 金澤, 裕2 Browse this author | 原, 毅彦3 Browse this author | 大野, 英男4 Browse this author | 長谷川, 英機5 Browse this author |
Authors(alt): | Arimoto, Satoshi1 | Kanazawa, Yutaka2 | Hara, Takahiko3 | Ohno, Hideo4 | Hasegawa, Hideki5 |
Issue Date: | 31-Jul-1985 |
Publisher: | 北海道大学 |
Journal Title: | 北海道大學工學部研究報告 |
Journal Title(alt): | Bulletin of the Faculty of Engineering, Hokkaido University |
Volume: | 127 |
Start Page: | 27 |
End Page: | 37 |
Type: | bulletin (article) |
URI: | http://hdl.handle.net/2115/41944 |
Appears in Collections: | 北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.127
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