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Controlled morphology of aluminum alloy nanopillar films : from nanohorns to nanoplates

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Title: Controlled morphology of aluminum alloy nanopillar films : from nanohorns to nanoplates
Authors: Fujii, Takashi Browse this author
Aoki, Yoshitaka Browse this author
Fushimi, Koji Browse this author
Makino, Takeshi Browse this author
Ono, Shoji Browse this author
Habazaki, Hiroki Browse this author →KAKEN DB
Keywords: nanopillar film
oblique angle deposition
Al-Nb alloys
anodic oxide
capacitor
Issue Date: 1-Oct-2010
Publisher: IOP Publishing
Journal Title: Nanotechnology
Volume: 21
Issue: 39
Start Page: 395302
Publisher DOI: 10.1088/0957-4484/21/39/395302
PMID: 20820099
Abstract: Nanopillar films of Al-Nb alloys have been fabricated on substrates with a regular concave cell structure by oblique angle physical vapor deposition. The concave cell structure of the substrate increases the shadow region for the flux of depositing atoms, assisting the formation of an isolated nanopillar on each cell. Depending upon the alloy composition and deposition angle, the pillar shape changes from horn-like nanopillars through triangular nanoprisms to nanoplates. The Al-Nb alloy nanoplate films with wide gaps between plates are of interest as electrodes for capacitor applications. The dielectric oxide film formed on the nanoplate film showed a capacitance more than 10 times larger than that on the respective flat film, due to the enlarged surface area.
Rights: This is an author-created, un-copyedited version of an article accepted for publication in Nanotechnology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The definitive publisher authenticated version is available online at 10.1088/0957-4484/21/39/395302
Type: article (author version)
URI: http://hdl.handle.net/2115/43936
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 幅崎 浩樹

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