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Controlled morphology of aluminum alloy nanopillar films : from nanohorns to nanoplates

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タイトル: Controlled morphology of aluminum alloy nanopillar films : from nanohorns to nanoplates
著者: Fujii, Takashi 著作を一覧する
Aoki, Yoshitaka 著作を一覧する
Fushimi, Koji 著作を一覧する
Makino, Takeshi 著作を一覧する
Ono, Shoji 著作を一覧する
Habazaki, Hiroki 著作を一覧する
キーワード: nanopillar film
oblique angle deposition
Al-Nb alloys
anodic oxide
capacitor
発行日: 2010年10月 1日
出版者: IOP Publishing
誌名: Nanotechnology
巻: 21
号: 39
開始ページ: 395302
出版社 DOI: 10.1088/0957-4484/21/39/395302
抄録: Nanopillar films of Al-Nb alloys have been fabricated on substrates with a regular concave cell structure by oblique angle physical vapor deposition. The concave cell structure of the substrate increases the shadow region for the flux of depositing atoms, assisting the formation of an isolated nanopillar on each cell. Depending upon the alloy composition and deposition angle, the pillar shape changes from horn-like nanopillars through triangular nanoprisms to nanoplates. The Al-Nb alloy nanoplate films with wide gaps between plates are of interest as electrodes for capacitor applications. The dielectric oxide film formed on the nanoplate film showed a capacitance more than 10 times larger than that on the respective flat film, due to the enlarged surface area.
Rights: This is an author-created, un-copyedited version of an article accepted for publication in Nanotechnology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The definitive publisher authenticated version is available online at 10.1088/0957-4484/21/39/395302
資料タイプ: article (author version)
URI: http://hdl.handle.net/2115/43936
出現コレクション:雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

提供者: 幅崎 浩樹

 

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