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Enhanced Capacitance of Composite Anodic ZrO2Films Comprising High Permittivity Oxide Nanocrystals and Highly Resistive Amorphous Oxide Matrix
| Title: | Enhanced Capacitance of Composite Anodic ZrO2Films Comprising High Permittivity Oxide Nanocrystals and Highly Resistive Amorphous Oxide Matrix |
| Authors: | Habazaki, Hiroki Browse this author | | Koyama, Shun Browse this author | | Aoki, Yoshitaka Browse this author | | Sakaguchi, Norihito Browse this author | | Nagata, Shinji Browse this author |
| Keywords: | anodic oxide | | dielectric film | | nanocomposite oxide | | ZrO2 | | capacitor |
| Issue Date: | 27-Jul-2011 |
| Publisher: | American Chemical Society |
| Journal Title: | ACS Applied Materials & Interfaces |
| Volume: | 3 |
| Issue: | 7 |
| Start Page: | 2665 |
| End Page: | 2670 |
| Publisher DOI: | 10.1021/am200460c |
| PMID: | 21648468 |
| Abstract: | Anodic oxide films with nanocrystalline tetragonal ZrO2 precipitated in an amorphous oxide matrix were formed on Zr Si and Zr Al alloys and had significantly enhanced capacitance in comparison with those formed on zirconium metal. The capacitance enhancement was associated with the formation of a high-temperature stable tetragonal ZrO2 phase with high relative permittivity as well as increased ionic resistivity, which reduces the thickness of anodic oxide films at a certain formation voltage. However, there is a general empirical trend that single-phase materials with higher permittivity have lower ionic resistivity. This study presents a novel material design based on a nanocrystalline amorphous composite anodic oxide film for capacitor applications. |
| Rights: | This document is the unedited Author's version of a Submitted Work that was subsequently accepted for publication in ACS Applied Materals & Interfaces, copyright © American Chemical Society after peer review. To access the final edited and published work see [DOI: 10.1021/am200460c]. |
| Type: | article (author version) |
| URI: | http://hdl.handle.net/2115/47412 |
| Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 幅崎 浩樹
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