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Enhanced Capacitance of Composite Anodic ZrO2Films Comprising High Permittivity Oxide Nanocrystals and Highly Resistive Amorphous Oxide Matrix

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Title: Enhanced Capacitance of Composite Anodic ZrO2Films Comprising High Permittivity Oxide Nanocrystals and Highly Resistive Amorphous Oxide Matrix
Authors: Habazaki, Hiroki Browse this author
Koyama, Shun Browse this author
Aoki, Yoshitaka Browse this author
Sakaguchi, Norihito Browse this author
Nagata, Shinji Browse this author
Keywords: anodic oxide
dielectric film
nanocomposite oxide
ZrO2
capacitor
Issue Date: 27-Jul-2011
Publisher: American Chemical Society
Journal Title: ACS Applied Materials & Interfaces
Volume: 3
Issue: 7
Start Page: 2665
End Page: 2670
Publisher DOI: 10.1021/am200460c
PMID: 21648468
Abstract: Anodic oxide films with nanocrystalline tetragonal ZrO2 precipitated in an amorphous oxide matrix were formed on Zr Si and Zr Al alloys and had significantly enhanced capacitance in comparison with those formed on zirconium metal. The capacitance enhancement was associated with the formation of a high-temperature stable tetragonal ZrO2 phase with high relative permittivity as well as increased ionic resistivity, which reduces the thickness of anodic oxide films at a certain formation voltage. However, there is a general empirical trend that single-phase materials with higher permittivity have lower ionic resistivity. This study presents a novel material design based on a nanocrystalline amorphous composite anodic oxide film for capacitor applications.
Rights: This document is the unedited Author's version of a Submitted Work that was subsequently accepted for publication in ACS Applied Materals & Interfaces, copyright © American Chemical Society after peer review. To access the final edited and published work see [DOI: 10.1021/am200460c].
Type: article (author version)
URI: http://hdl.handle.net/2115/47412
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 幅崎 浩樹

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