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Attenuated total reflection Fourier transform infrared spectroscopy study of the adsorption of organic contaminants on a hydrogen-terminated Si(111) surface in air

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Title: Attenuated total reflection Fourier transform infrared spectroscopy study of the adsorption of organic contaminants on a hydrogen-terminated Si(111) surface in air
Authors: Ye, Shen Browse this author
Ichihara, Taro Browse this author
Uosaki, Kohei Browse this author →KAKEN DB
Keywords: silicon
adsorption
surface contamination
attenuated total reflection
infrared spectra
spectrochemical analysis
Fourier transform spectra
hydrogen
spectral line intensity
elemental semiconductors
Issue Date: 13-Sep-1999
Publisher: American Institute of Physics
Journal Title: Applied Physics Letters
Volume: 75
Issue: 11
Start Page: 1562
End Page: 1564
Publisher DOI: 10.1063/1.124755
Abstract: The adsorption of organic contaminants on a hydrogen-terminated Si(111) surface was investigated using attenuated total reflection Fourier transform infrared spectroscopy. When the hydrogen-terminated Si(111) surface was exposed to dry air, the sharp Si-H monohydride peak became weaker and a broad component became visible in the lower wave-number region. Furthermore, a number of bands within the C-H stretching region were observed. The intensity of the sharp Si-H band was recovered to a certain extent and those of the broad component and the C-H bands decreased after the sample was rinsed in hexane. These results suggest that the contamination by organic adsorbates is not accompanied by a chemical bond formation.
Rights: Copyright 1999 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Appl. Phys. Lett. 75, 1562 (1999) and may be found at https://dx.doi.org/10.1063/1.124755
Type: article
URI: http://hdl.handle.net/2115/50239
Appears in Collections:理学院・理学研究院 (Graduate School of Science / Faculty of Science) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 魚崎 浩平

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