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Growth of GaAs/AlGaAs hexagonal pillars on GaAs (1 1 1)B surfaces by selective-area MOVPE
| Title: | Growth of GaAs/AlGaAs hexagonal pillars on GaAs (1 1 1)B surfaces by selective-area MOVPE |
| Authors: | Motohisa, J.1 Browse this author →KAKEN DB | | Takeda, J. Browse this author | | Inari, M. Browse this author | | Noborisaka, J. Browse this author | | Fukui, T. Browse this author →KAKEN DB |
| Authors(alt): | 本久, 順一1 |
| Keywords: | Metalorganic vapor phase epitaxy | | Selective area growth | | Photonic crystals | | Nanowires |
| Issue Date: | Jul-2004 |
| Publisher: | Elsevier B.V. |
| Journal Title: | Physica E: Low-dimensional Systems and Nanostructures |
| Volume: | 23 |
| Issue: | 3-4 |
| Start Page: | 298 |
| End Page: | 304 |
| Publisher DOI: | 10.1016/j.physe.2003.11.279 |
| Abstract: | We report on the growth of GaAs and GaAs/AlGaAs heterostructured hexagonal pillar structures using selective area (SA) metalorganic vapor phase epitaxy (MOVPE). By performing growth on SiO2-masked (1 1 1)B GaAs substrates with circular or hexagonal hole openings, extremely uniform array of hexagonal GaAs/AlGaAs pillars consisting {1 1 0} vertical facets with their diameter of order of 100 nm were obtained. Unexpectedly, strong intense light emission was observed for the room temperature photoluminescence measurement of the pillar arrays in triangular lattice, which is promising for the application to the photonic crystals to enhance the light extraction efficiency from the materials with high refractive index. Furthermore, it was also found that hexagonal pillars with size 60 nm and large aspect ratio (>100) by reducing the size of initial hole size of mask, opening a possibility to grow nanowires using epitaxial growth. |
| Relation: | http://www.sciencedirect.com/science/journal/13869477 |
| Type: | article (author version) |
| URI: | http://hdl.handle.net/2115/5526 |
| Appears in Collections: | 量子集積エレクトロニクス研究センター (Research Center for Integrated Quantum Electronics) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 本久 順一
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