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Precise Structural Control of GaN Porous Nanostructures Utilizing Anisotropic Electrochemical and Chemical Etching for the Optical and Photoelectrochemical Applications

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/66290

Title: Precise Structural Control of GaN Porous Nanostructures Utilizing Anisotropic Electrochemical and Chemical Etching for the Optical and Photoelectrochemical Applications
Authors: Kumazaki, Yusuke Browse this author
Matsumoto, Satoru Browse this author
Sato, Taketomo Browse this author →KAKEN DB
Keywords: anisotropic etching
electrochemical etching
GaN
nano structure
photocatalyst
photoelectrode
porous structure
tetramethylammonium hydroxide (TMAH)
water splitting
Issue Date: 12-May-2017
Publisher: The Electrochemical Society (ECS)
Journal Title: Journal of The Electrochemical Society
Volume: 164
Issue: 7
Start Page: H477
End Page: H483
Publisher DOI: 10.1149/2.0771707jes
Abstract: A low-damaged wet process utilizing electrochemical (EC) etching and subsequent chemical etching has been developed for the fabrication of GaN porous structures. Superior controllability in depth and diameter could be obtained by achieving anisotropic nature of the vertical direction to the substrate by EC etching and horizontal direction by tetramethylammonium hydroxide (TMAH) etching, respectively. The optical and photoelectrochemical properties of GaN porous structures were very sensitive to the structural properties. Photoreflectance measurement revealed that porous sample had an effective refractive index that could be controlled by TMAH etching time. In photoelectrochemical measurement, the incident-photon-to-current conversion efficiency (IPCE) was dramatically enhanced to as high as 91% by the formation of porous structures. A series of experimental results were consistently explained by the change of thickness of pore wall and width of space charge region.
Rights: http://creativecommons.org/licenses/by/4.0/
Type: article
URI: http://hdl.handle.net/2115/66290
Appears in Collections:量子集積エレクトロニクス研究センター (Research Center for Integrated Quantum Electronics) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 佐藤 威友

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