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Growth kinetics and theoretical modeling of selective molecular beam epitaxy for growth of GaAs nanowires on nonplanar (001) and (111)B substrates

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Title: Growth kinetics and theoretical modeling of selective molecular beam epitaxy for growth of GaAs nanowires on nonplanar (001) and (111)B substrates
Authors: Sato, Taketomo Browse this author →KAKEN DB
Tamai, Isao Browse this author
Hasegawa, Hideki Browse this author
Issue Date: Jul-2005
Publisher: American Vacuum Society
Journal Title: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume: 23
Issue: 4
Start Page: 1706
End Page: 1713
Publisher DOI: 10.1116/1.1949222
Abstract: The growth kinetics involved in the selective molecular beam epitaxy growth of GaAs quantum wires (QWRs) on mesa-patterned substrates is investigated in detail experimentally, and an attempt is made to model the growth theoretically, using a phenomenological continuum model. Experimentally, <-110>-oriented QWRs were grown on (001) and (113)A substrates, and <-1-12>-oriented QWRs were grown on (111)B substrates. From a detailed investigation of the growth profiles, it was found that the lateral wire width is determined by facet boundaries (FBs) within AlGaAs layers separating growth regions on top facets from those on side facets of mesa structures. Evolution of FBs during growth was complicated. For computer simulation, measured growth rates of various facets were fitted into a theoretical formula to determine the dependence of a lifetime of adatoms on the slope angle of the growing surface. The continuum model using the slope angle dependent lifetime reproduced the details of the experimentally observed growth profiles very well for growth on (001), (113)A, and (111)B substrates, including the complex evolution of facet boundaries
Rights: © 2005 American Vacuum Society
Relation: http://scitation.aip.org/jvstb/
Type: article
URI: http://hdl.handle.net/2115/8381
Appears in Collections:量子集積エレクトロニクス研究センター (Research Center for Integrated Quantum Electronics) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 佐藤 威友

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