Title: | Wafer-scale integration of GaAs/AlGaAs core-shell nanowires on silicon by the single process of self-catalyzed molecular beam epitaxy |
Authors: | Minehisa, Keisuke Browse this author |
Murakami, Ryo Browse this author |
Hashimoto, Hidetoshi Browse this author |
Nakama, Kaito Browse this author |
Sakaguchi, Kenta Browse this author |
Tsutsumi, Rikuo Browse this author |
Tanigawa, Takeru Browse this author |
Yukimune, Mitsuki Browse this author |
Nagashima, Kazuki Browse this author |
Yanagida, Takeshi Browse this author |
Sato, Shino Browse this author |
Hiura, Satoshi Browse this author |
Murayama, Akihiro Browse this author →KAKEN DB |
Ishikawa, Fumitaro Browse this author →KAKEN DB |
Issue Date: | 21-Mar-2023 |
Publisher: | Royal Society of Chemistry |
Journal Title: | Nanoscale advances |
Volume: | 5 |
Issue: | 6 |
Start Page: | 1651 |
End Page: | 1663 |
Publisher DOI: | 10.1039/d2na00848c |
Abstract: | GaAs/AlGaAs core-shell nanowires, typically having 250 nm diameter and 6 mu m length, were grown on 2-inch Si wafers by the single process of molecular beam epitaxy using constituent Ga-induced self-catalysed vapor-liquid-solid growth. The growth was carried out without specific pre-treatment such as film deposition, patterning, and etching. The outermost Al-rich AlGaAs shells form a native oxide surface protection layer, which provides efficient passivation with elongated carrier lifetime. The 2-inch Si substrate sample exhibits a dark-colored feature due to the light absorption of the nanowires where the reflectance in the visible wavelengths is less than 2%. Homogeneous and optically luminescent and adsorptive GaAs-related core-shell nanowires were prepared over the wafer, showing the prospect for large-volume III-V heterostructure devices available with this approach as complementary device technologies for integration with silicon. |
Type: | article |
URI: | http://hdl.handle.net/2115/88606 |
Appears in Collections: | 量子集積エレクトロニクス研究センター (Research Center for Integrated Quantum Electronics) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
|