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Wafer-scale integration of GaAs/AlGaAs core-shell nanowires on silicon by the single process of self-catalyzed molecular beam epitaxy

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Title: Wafer-scale integration of GaAs/AlGaAs core-shell nanowires on silicon by the single process of self-catalyzed molecular beam epitaxy
Authors: Minehisa, Keisuke Browse this author
Murakami, Ryo Browse this author
Hashimoto, Hidetoshi Browse this author
Nakama, Kaito Browse this author
Sakaguchi, Kenta Browse this author
Tsutsumi, Rikuo Browse this author
Tanigawa, Takeru Browse this author
Yukimune, Mitsuki Browse this author
Nagashima, Kazuki Browse this author
Yanagida, Takeshi Browse this author
Sato, Shino Browse this author
Hiura, Satoshi Browse this author
Murayama, Akihiro Browse this author →KAKEN DB
Ishikawa, Fumitaro Browse this author →KAKEN DB
Issue Date: 21-Mar-2023
Publisher: Royal Society of Chemistry
Journal Title: Nanoscale advances
Volume: 5
Issue: 6
Start Page: 1651
End Page: 1663
Publisher DOI: 10.1039/d2na00848c
Abstract: GaAs/AlGaAs core-shell nanowires, typically having 250 nm diameter and 6 mu m length, were grown on 2-inch Si wafers by the single process of molecular beam epitaxy using constituent Ga-induced self-catalysed vapor-liquid-solid growth. The growth was carried out without specific pre-treatment such as film deposition, patterning, and etching. The outermost Al-rich AlGaAs shells form a native oxide surface protection layer, which provides efficient passivation with elongated carrier lifetime. The 2-inch Si substrate sample exhibits a dark-colored feature due to the light absorption of the nanowires where the reflectance in the visible wavelengths is less than 2%. Homogeneous and optically luminescent and adsorptive GaAs-related core-shell nanowires were prepared over the wafer, showing the prospect for large-volume III-V heterostructure devices available with this approach as complementary device technologies for integration with silicon.
Type: article
URI: http://hdl.handle.net/2115/88606
Appears in Collections:量子集積エレクトロニクス研究センター (Research Center for Integrated Quantum Electronics) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

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