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Cross-Sectional Evolution and Its Mechanism during Selective Molecular Beam Epitaxy Growth of GaAs Quantum Wires on (111)B Substrates

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Title: Cross-Sectional Evolution and Its Mechanism during Selective Molecular Beam Epitaxy Growth of GaAs Quantum Wires on (111)B Substrates
Authors: Tamai, Isao Browse this author
Sato, Taketomo Browse this author →KAKEN DB
Hasegawa, Hideki Browse this author
Keywords: selective growth
molecular beam epitaxy (MBE)
(111)B-patterned substrates
growth mechanism
GaAs
AlGaAs
Issue Date: Apr-2005
Publisher: Japan Society of Applied Physics
Journal Title: Japanese Journal of Applied Physics. Pt. 1, Regular papers, brief communications & review papers
Volume: 44
Issue: 4B
Start Page: 2652
End Page: 2656
Publisher DOI: 10.1143/JJAP.44.2652
Abstract: The mechanism of the cross-sectional evolution during the selective growth of GaAs quantum wires (QWRs) on (111)B-patterned substrates was studied in detail both experimentally and theoretically. For this purpose, growth experiments were carried out on <-1-12>-oriented wires by systematically changing growth conditions and pattern sizes. A detailed investigation on cross sections of wires has shown that the lateral wire width is determined by facet boundaries (FBs) within AlGaAs layers separating growth regions on top facets from those on side facets of mesa structures. FBs were found to be planar or curved, depending on initial pattern sizes and growth conditions. Computer simulation based on a phenomenological growth model was attempted, taking account of the facet-angle-dependent lifetime of adatoms. The simulation well reproduced the experimentally observed growth features including the evolution of FBs, indicating that the cross sections of wires grown on (111)B-patterned substrates are kinetically controlled by the pattern sizes and growth conditions.
Rights: Copyright © 2005 The Japan Society of Applied Physics
Type: article (author version)
URI: http://hdl.handle.net/2115/33095
Appears in Collections:量子集積エレクトロニクス研究センター (Research Center for Integrated Quantum Electronics) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 佐藤 威友

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